EFFECT OF DEPOSITION CONDITIONS ON THE NUCLEATION AND GROWTH OF GLOW-DISCHARGE A-SI-H

被引：31

作者：

COLLINS, RW

CAVESE, JM

机构：

来源：

关键词：

D O I：

10.1063/1.338032

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1869 / 1882

页数：14

共 47 条

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