VIBRATIONAL SPECTROSCOPY OF GROWTH SURFACES DURING PHOTOCHEMICAL DEPOSITION OF ALUMINUM FROM TRIMETHYLALUMINUM VAPOR

被引：27

作者：

HIGASHI, GS

ROTHBERG, LJ

FLEMING, CG

机构：

来源：

CHEMICAL PHYSICS LETTERS | 1985年 / 115卷 / 02期

关键词：

D O I：

10.1016/0009-2614(85)80672-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：167 / 172

页数：6

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共 24 条

[1] AN INFRARED REFLECTION SPECTROSCOPY STUDY OF ORIENTED CADMIUM ARACHIDATE MONOLAYER FILMS ON EVAPORATED SILVER
ALLARA, DL
SWALEN, JD
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1982, 86 (14) : 2700 - 2704
[2] Bellamy L.J, 1975, INFRARED SPECTRA COM
[3] BOYER PK, 1983, MATER RES SOC S P, V17, P119
[4] SURFACE PHOTO-ACOUSTIC WAVE SPECTROSCOPY OF THIN-FILMS
BRUECK, SRJ
DEUTSCH, TF
OATES, DE
[J]. APPLIED PHYSICS LETTERS, 1983, 43 (02) : 157 - 159
[5] MEASUREMENT OF THE ELECTRONIC-SPECTRA OF PHYSISORBED MOLECULAR LAYERS
CHEN, CJ
OSGOOD, RM
[J]. CHEMICAL PHYSICS LETTERS, 1983, 98 (04) : 363 - 368
[6] DIRECT OBSERVATION OF THE LOCAL-FIELD-ENHANCED SURFACE PHOTOCHEMICAL-REACTIONS
CHEN, CJ
OSGOOD, RM
[J]. PHYSICAL REVIEW LETTERS, 1983, 50 (21) : 1705 - 1708
[7] PHOTODEPOSITION OF METAL-FILMS WITH ULTRAVIOLET-LASER LIGHT
EHRLICH, DJ
OSGOOD, RM
DEUTSCH, TF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (01): : 23 - 32
[8] UV PHOTOLYSIS OF VANDERWAALS MOLECULAR FILMS
EHRLICH, DJ
OSGOOD, RM
[J]. CHEMICAL PHYSICS LETTERS, 1981, 79 (02) : 381 - 388
[9] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS
EHRLICH, DJ
OSGOOD, RM
DEUTSCH, TF
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) : 1233 - 1243
[10] SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION
EHRLICH, DJ
OSGOOD, RM
DEUTSCH, TF
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (11) : 946 - 948