IMPACT OF COPPER CONTAMINATION ON THE QUALITY OF SILICON-OXIDES

被引:81
作者
WENDT, H [1 ]
CERVA, H [1 ]
LEHMANN, V [1 ]
PAMLER, W [1 ]
机构
[1] SIEMENS AG, CORP RES LABS, D-8000 MUNICH 83, FED REP GER
关键词
D O I
10.1063/1.342808
中图分类号
O59 [应用物理学];
学科分类号
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页码:2402 / 2405
页数:4
相关论文
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