ELECTRONIC AND VIBRATIONAL PROPERTIES OF SEMICONDUCTING CRYSTALLINE FESI2 LAYERS GROWN ON SI(111)

被引:53
作者
RIZZI, A
MORITZ, H
LUTH, H
机构
[1] Institut für Schicht-und lonentechnik, Forschungszen trum Jiilich, D-5170 J ü lich
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 03期
关键词
D O I
10.1116/1.577340
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Semiconducting FeSi2 thin layers have been grown on Si(111) by solid state reaction under ultrahigh vacuum (UHV) conditions. The different reaction steps in the temperature range 380-750-degrees-C were followed in situ by Auger electron spectroscopy (AES) and electron energy-loss spectroscopy (EELS). FeSi2 is formed between 550 and 680-degrees-C. At higher temperatures the silicide thin film disrupts forming islands as shown by EELS and ex situ medium-energy ion scattering (MEIS). The low energy excitation spectra of the thin FeSi2 layers were measured by high-resolution electron energy-loss spectroscopy (HREELS). Surface phonon excitations at 50 meV energy are observed and explained in the framework of dielectric theory of surface scattering. This is the first time that Fuchs-Kliewer surface phonons, thpical for heteropolar crystals such as GaAs, ZnO, etc. are so clearly observed on a silicide surface by HREELS. Their presence gives evidence of the semiconducting character of the FeSi2 overlayer. A broad loss structure occurs in the higher energy range corresponding to the excitation of electronic interband transitions. The onset of this structure at approximately 0.8 eV gives an indication of the band gap energy of the silicide. Its intensity together with the small experimental q parallel-to transfer is an evidence of a direct band gap for the FeSi2 layer.
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页码:912 / 916
页数:5
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共 32 条
[11]  
Dusausoy P Y., 1971, ACTA CRYSTALLOGR B, V27, P1209, DOI [10.1107/S0567740871003765, DOI 10.1107/S0567740871003765]
[12]   BONDING STATE OF SILICON SEGREGATED TO ALPHA-IRON SURFACES AND ON IRON SILICIDE SURFACES STUDIED BY ELECTRON-SPECTROSCOPY [J].
EGERT, B ;
PANZNER, G .
PHYSICAL REVIEW B, 1984, 29 (04) :2091-2101
[13]  
FUCHS R, 1965, PHYS REV, V140, P2076
[14]  
HEINZ B, COMMUNICATION
[15]  
Ibach H., 1982, ELECTRON ENERGY LOSS
[16]   LOW-TEMPERATURE SURFACE CLEANING OF SILICON AND ITS APPLICATION TO SILICON MBE [J].
ISHIZAKA, A ;
SHIRAKI, Y .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (04) :666-671
[17]   XPS INVESTIGATIONS OF FESI, FESI2 AND FE IMPLANTED IN SI AND GE [J].
KINSINGER, V ;
DEZSI, I ;
STEINER, P ;
LANGOUCHE, G .
JOURNAL OF PHYSICS-CONDENSED MATTER, 1990, 2 (22) :4955-4961
[18]   ELECTRON-ENERGY-LOSS SPECTROSCOPY OF MULTILAYERED MATERIALS - THEORETICAL ASPECTS AND STUDY OF INTERFACE OPTICAL PHONONS IN SEMICONDUCTOR SUPERLATTICES [J].
LAMBIN, P ;
VIGNERON, JP ;
LUCAS, AA .
PHYSICAL REVIEW B, 1985, 32 (12) :8203-8215
[19]   IRON SILICIDE THIN-FILM FORMATION AT LOW-TEMPERATURES [J].
LAU, SS ;
FENG, JSY ;
OLOWOLAFE, JO ;
NICOLET, MA .
THIN SOLID FILMS, 1975, 25 (02) :415-422
[20]   PHOTOEMISSION-STUDIES OF CHEMICAL BONDING AND ELECTRONIC STATES AT THE FE/SI INTERFACE [J].
LI, BQ ;
JI, MR ;
WU, JX ;
HSU, CC .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (03) :1099-1103