XPS INVESTIGATIONS OF FESI, FESI2 AND FE IMPLANTED IN SI AND GE

被引:32
作者
KINSINGER, V
DEZSI, I
STEINER, P
LANGOUCHE, G
机构
[1] UNIV SAARLAND,FACHBEREICH ANGEW PHYS 111,W-6600 SAARBRUCKEN,GERMANY
[2] CATHOLIC UNIV LEUVEN,INST KERN & STRALINGSFYS,B-3030 HEVERLE,BELGIUM
关键词
D O I
10.1088/0953-8984/2/22/016
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Polycrystalline FeSi and FeSi2 samples have been examined by ESCA experiments. The valence band spectra show features that can be attributed to bonding and non-bonding states, as is the case for other transition metal silicides, where bonding is expressed in terms of hybridisation. Furthermore the authors have investigated the photoelectron spectra of samples of Si and Ge implanted with Fe at an energy of 40 keV in order to draw some conclusions regarding the character of the Fe-Si bonding in the disordered layer. The concentration of Fe as a function of the sample depth was also determined and compared with the results of Monte Carlo calculations.
引用
收藏
页码:4955 / 4961
页数:7
相关论文
共 29 条
[1]   INVERSE PHOTOEMISSION-STUDY OF NICKEL SILICIDES [J].
AZIZAN, M ;
BAPTIST, R ;
CHAUVET, G ;
TAN, TAN .
SOLID STATE COMMUNICATIONS, 1986, 57 (01) :1-3
[2]   TRANSITION-METAL SILICIDES - ASPECTS OF THE CHEMICAL-BOND AND TRENDS IN THE ELECTRONIC-STRUCTURE [J].
BISI, O ;
CALANDRA, C .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1981, 14 (35) :5479-5494
[3]   PREFERENTIAL SPUTTERING OF FESI(100) SINGLE-CRYSTAL SURFACES BY ARGON, NEON, AND KRYPTON ION-BOMBARDMENT [J].
CASTRO, GR ;
BALLESTEROS, A .
SURFACE SCIENCE, 1988, 204 (03) :415-427
[4]   BONDING STATE OF SILICON SEGREGATED TO ALPHA-IRON SURFACES AND ON IRON SILICIDE SURFACES STUDIED BY ELECTRON-SPECTROSCOPY [J].
EGERT, B ;
PANZNER, G .
PHYSICAL REVIEW B, 1984, 29 (04) :2091-2101
[5]   CALCULATED CORE-LEVEL SENSITIVITY FACTORS FOR QUANTITATIVE XPS USING AN HP5950B SPECTROMETER [J].
ELLIOTT, I ;
DOYLE, C ;
ANDRADE, JD .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1983, 28 (04) :303-316
[6]   SILICON-REFRACTORY METAL INTERFACES - EVIDENCE OF ROOM-TEMPERATURE INTERMIXING FOR SI-CR [J].
FRANCIOSI, A ;
PETERMAN, DJ ;
WEAVER, JH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :657-660
[7]   CHEMICAL BONDING AND CHARGE REDISTRIBUTION - VALENCE BAND AND CORE LEVEL CORRELATIONS FOR THE NI/SI, PD/SI, AND PT/SI SYSTEMS [J].
GRUNTHANER, PJ ;
GRUNTHANER, FJ ;
MADHUKAR, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :680-683
[8]   CHEMICAL TREND IN SILICIDE ELECTRONIC-STRUCTURE AND SCHOTTKY-BARRIER HEIGHTS OF SILICIDE-SILICON INTERFACES [J].
HARA, S ;
OHDOMARI, I .
PHYSICAL REVIEW B, 1988, 38 (11) :7554-7557
[9]   SCHOTTKY-BARRIER HEIGHTS OF TRANSITION-METAL-SILICIDE SILICON CONTACTS STUDIED BY X-RAY PHOTOELECTRON-SPECTROSCOPY MEASUREMENTS [J].
HIROSE, K ;
OHDOMARI, I ;
UDA, M .
PHYSICAL REVIEW B, 1988, 37 (12) :6929-6932
[10]   EXTREME ULTRAVIOLET PHOTOEMISSION OF MNSI, FESI AND COSI [J].
KAKIZAKI, A ;
SUGAWARA, H ;
NAGAKURA, I ;
ISHIKAWA, Y ;
KOMATSUBARA, T ;
ISHII, T .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1982, 51 (08) :2597-2603