ADSORPTION OF ATOMIC OXYGEN ON THE SI(100) SURFACE

被引:28
作者
SMITH, PV
WANDER, A
机构
关键词
D O I
10.1016/0039-6028(89)90200-8
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:77 / 87
页数:11
相关论文
共 26 条
[1]   CHEMISORPTION OF ATOMIC AND MOLECULAR-OXYGEN ON THE (100) SURFACE OF SILICON - A THEORETICAL-STUDY [J].
BARONE, V ;
LELJ, F ;
RUSSO, N ;
TOSCANO, M .
SURFACE SCIENCE, 1985, 162 (1-3) :230-238
[2]   THE CLUSTER APPROACH IN THE STUDY OF ATOMIC AND MOLECULAR CHEMISORPTION ON SILICON [J].
BARONE, V .
SURFACE SCIENCE, 1987, 189 :106-113
[3]   THEORETICAL-STUDY OF THE ADSORPTION OF OXYGEN ON SI(100) [J].
BATRA, IP ;
BAGUS, PS ;
HERMANN, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :1075-1078
[4]   CHEMISORPTION OF ATOMIC OXYGEN ON SI(100) - SELF-CONSISTENT CLUSTER AND SLAB MODEL INVESTIGATIONS [J].
BATRA, IP ;
BAGUS, PS ;
HERMANN, K .
PHYSICAL REVIEW LETTERS, 1984, 52 (05) :384-387
[5]   SIMPLE VALENCE FORCE FIELD-BOND ENERGY BOND ORDER (SVFF-BEBO) MODEL FOR CHEMISORPTION OF OXYGEN ON SI(111) [J].
BHANDIA, AS ;
SCHWARZ, JA .
SURFACE SCIENCE, 1981, 108 (03) :587-604
[6]   THEORETICAL AND EXPERIMENTAL INVESTIGATIONS OF THE ELECTRONIC-STRUCTURE OF OXYGEN ON SILICON [J].
CHEN, M ;
BATRA, IP ;
BRUNDLE, CR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1216-1220
[7]   INTERPRETATION OF THE SPECTRA OBTAINED FROM OXYGEN-ADSORBED AND OXIDIZED SILICON SURFACES [J].
CIRACI, S ;
ELLIALTIOGLU, S ;
ERKOC, S .
PHYSICAL REVIEW B, 1982, 26 (10) :5716-5729
[8]  
CRAIG BI, IN PRESS SURFACE SCI
[9]   CHEMISORPTION OF ATOMIC OXYGEN ON SILICON SURFACE [J].
ELLIALTIOGLU, S ;
CIRACI, S .
SOLID STATE COMMUNICATIONS, 1982, 42 (12) :879-881
[10]   SELF-CONSISTENT MOLECULAR-ORBITAL METHODS .25. SUPPLEMENTARY FUNCTIONS FOR GAUSSIAN-BASIS SETS [J].
FRISCH, MJ ;
POPLE, JA ;
BINKLEY, JS .
JOURNAL OF CHEMICAL PHYSICS, 1984, 80 (07) :3265-3269