ADSORPTION OF ATOMIC OXYGEN ON THE SI(100) SURFACE

被引:28
作者
SMITH, PV
WANDER, A
机构
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D O I
10.1016/0039-6028(89)90200-8
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:77 / 87
页数:11
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