MECHANICAL-PROPERTIES OF HEAT-TREATED CZ-SI WAFERS FROM BRITTLE TO DUCTILE TEMPERATURE-RANGE

被引：23

作者：

YASUTAKE, K

MURAKAMI, J

UMENO, M

KAWABE, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1982年 / 21卷 / 05期

关键词：

D O I：

10.1143/JJAP.21.L288

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L288 / L290

页数：3

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