INTERFACE STABILITY IN ELECTROLYTIC DECOMPOSITION OF SILICON DIOXIDE FILMS AT ELEVATED-TEMPERATURES

被引:1
作者
HINZE, JW
BAKER, JA
PATTERSO.JW
机构
[1] IOWA STATE UNIV, ENGN RES INST, AMES, IA 50010 USA
[2] IOWA STATE UNIV, DEPT MET, AMES, IA 50010 USA
关键词
D O I
10.1149/1.2401680
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1328 / 1332
页数:5
相关论文
共 19 条
[1]  
Bruckner R., 1971, Journal of Non-Crystalline Solids, V5, P177, DOI 10.1016/0022-3093(71)90032-9
[2]   GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J].
DEAL, BE ;
GROVE, AS .
JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) :3770-&
[3]  
DOREMUS RH, 1972, OCT P AM SOC MET MAT
[4]  
Frischat G. H., 1972, GLASTECH BER, V45, P309
[5]  
Hansen M., 1958, J ELECTROCHEM SOC, DOI DOI 10.1149/1.2428700
[6]  
HSUEH L, 1969, DA44009AMC1661T UCLA
[7]   ELECTROLYSIS OF SIO2 ON SILICON [J].
JORGENSE.PJ .
JOURNAL OF CHEMICAL PHYSICS, 1968, 49 (04) :1594-+
[8]   EFFECT OF AN ELECTRIC FIELD ON SILICON OXIDATION [J].
JORGENSEN .
JOURNAL OF CHEMICAL PHYSICS, 1962, 37 (04) :874-&
[9]   COMMENTS ON PAPER TRANSPORT PROCESSES IN THERMAL OXIDATION OF SILICON [J].
JORGENSEN, PJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (08) :820-+
[10]  
KARUBE KN, 1963, JPN J APPL PHYS, V2, P11