AN OUTLINE THEORY OF SURFACE-MORPHOLOGY DEVELOPMENT DURING RADIATION ENHANCED REACTANT GAS EROSION

被引：3

作者：

CARTER, G

NOBES, MJ

机构：

来源：

VACUUM | 1982年 / 32卷 / 09期

关键词：

D O I：

10.1016/0042-207X(82)93793-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：593 / 599

页数：7

共 31 条

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[6] INFLUENCE OF SURFACE-DIFFUSION ON TOPOGRAPHY DEVELOPMENT OF AN AMORPHOUS SOLID DURING SPUTTERING [J].

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[7] GROWTH OF TOPOGRAPHY DURING SPUTTERING OF AMORPHOUS SOLIDS .4. GENERALIZED THEORY [J].

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[8]

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[9]

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[10]

CARTER G, 1979, RAD EFFECTS, V37, P21

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