OPTICAL-PROPERTIES OF TRANSPARENT AND HEAT REFLECTING ZNO-AL FILMS MADE BY REACTIVE SPUTTERING

被引：64

作者：

JIN, ZC

HAMBERG, I

GRANQVIST, CG

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 03期

关键词：

D O I：

10.1063/1.99008

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：149 / 151

页数：3

共 17 条

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[9] HIGHLY CONDUCTIVE AND TRANSPARENT ZNO THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING IN AN APPLIED EXTERNAL DC MAGNETIC-FIELD [J].

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