LASER STIMULATED SCATTERING MICROSCOPE - A TOOL FOR INVESTIGATING MODIFIED METALLIC SURFACES

被引：16

作者：

HARATA, A

NISHIMURA, H

TANAKA, T

SAWADA, T

机构：

[1] Department of Industrial Chemistry, Faculty of Engineering, University of Tokyo, Bunkyo, Tokyo 113

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 03期

关键词：

D O I：

10.1063/1.1144186

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An instrument, based on the principle of microscopic measurements using transient reflecting gratings, has been built for investigation of modified metallic surfaces. After holographic illumination of focused light pulses of short duration, dynamic processes are observed by detecting the reflecting diffraction of the synchronously delayed probe pulse, while the sample is two-dimensionally scanned. Distribution imaging and relaxation time (or diffusivity) imaging are demonstrated for ion-implanted silicon wafers.

引用

页码：618 / 622

页数：5

共 22 条

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