LASER-STIMULATED NONTHERMAL PARTICLE-EMISSION FROM INP AND GAAS-SURFACES

被引:14
作者
RAFF, M
SCHUTZE, M
TRAPPE, C
HANNOT, R
KURZ, H
机构
[1] Institute of Semiconductor Electronics, Rheinisch-Westfälische Technische Hochschule Aachen
来源
PHYSICAL REVIEW B | 1994年 / 50卷 / 15期
关键词
D O I
10.1103/PhysRevB.50.11031
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Particle emission from InP and GaAs surfaces induced by picosecond laser pulses of photon energies above the band-gap energy has been studied by means of crater-depth measurements. Below the melting threshold, the amount of atoms sublimated per laser pulse indicates that nonthermal processes are dominant. The crater profile shows a strong power dependence of the yield on the laser fluence. Both emission yield and crater profile can be explained by nonradiative energy transfer from recombining electron-hole pairs to atoms at surface sites.
引用
收藏
页码:11031 / 11036
页数:6
相关论文
共 41 条
[21]  
KURZ H, 1987, MRS S P, V75
[22]   A STUDY OF GROUP-V ELEMENT DESORPTION FROM INAS, INP, GAAS AND GAP BY REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION [J].
LIANG, BW ;
TU, CW .
JOURNAL OF CRYSTAL GROWTH, 1993, 128 (1-4) :538-542
[23]   A STUDY OF GROUP-V DESORPTION FROM GAAS AND GAP BY REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION IN GAS-SOURCE MOLECULAR-BEAM EPITAXY [J].
LIANG, BW ;
TU, CW .
JOURNAL OF APPLIED PHYSICS, 1992, 72 (07) :2806-2809
[24]   COMPUTER MODELING OF THE TEMPERATURE RISE AND CARRIER CONCENTRATION INDUCED IN SILICON BY NANOSECOND LASER-PULSES [J].
LIETOILA, A ;
GIBBONS, JF .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) :3207-3213
[25]   LASER-INDUCED SPUTTERING OF ZNO, TIO2, CDSE AND GAP NEAR THRESHOLD LASER FLUENCE [J].
NAKAYAMA, T .
SURFACE SCIENCE, 1983, 133 (01) :101-113
[26]   TEMPERATURE-DEPENDENCE OF DESORPTION IN HIGHLY PHOTO-EXCITED CDS [J].
NAMIKI, A ;
FUKANO, H ;
KAWAI, T ;
YASUDA, Y ;
NAKAMURA, T .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1985, 54 (08) :3162-3167
[27]   LASER STIMULATED DESORPTION FROM COMPOUND SEMICONDUCTORS, DIMERIZATION ENHANCED PHASE-TRANSITION [J].
NAMIKI, A ;
CHO, S ;
ICHIGE, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (01) :39-44
[28]   ANGLE-RESOLVED TIME-OF-FLIGHT SPECTRA OF NEUTRAL PARTICLES DESORBED FROM LASER IRRADIATED CDS [J].
NAMIKI, A ;
KAWAI, T ;
ICHIGE, K .
SURFACE SCIENCE, 1986, 166 (01) :129-140
[29]   A MODEL OF LASER ABLATION IN NONMETALLIC INORGANIC SOLIDS [J].
OKANO, A ;
MATSUURA, AY ;
HATTORI, K ;
ITOH, N ;
SINGH, J .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (07) :3158-3162
[30]  
Polanyi M, 1928, Z PHYS CHEM-STOCH VE, V139, P439