PROFILE DISTORTION IN SIMS

[1] IMPLICATIONS IN THE USE OF SPUTTERING FOR LAYER REMOVAL - SYSTEM AU ON SI [J]. RADIATION EFFECTS LETTERS, 1979, 43 (03): : 105 - 110

[2] BOUDEWIJN PR, UNPUB

[3] SIMS STUDY OF THE SIO2/SI INTERFACE AND OF THE SI+O2 SYSTEM [J]. SURFACE AND INTERFACE ANALYSIS, 1983, 5 (02) : 83 - 86

[4] SIMS ANALYSIS OF AQUEOUS CORROSION PROFILES IN SODA-LIME-SILICA GLASS [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1979, 62 (1-2) : 4 - 9

[5] ION-INDUCED MIGRATION OF CU INTO SI [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) : 1947 - 1951

[6] Hofmann S., 1980, Surface and Interface Analysis, V2, P148, DOI 10.1002/sia.740020406

[7] LITMARK U, 1980, NUCL INSTRUM METHODS, V168, P329

[8] MAGEE CW, 1982, SPRINGER SERIES CHEM, V19

[9] THE INFLUENCE OF BOMBARDMENT CONDITIONS UPON THE SPUTTERING AND SECONDARY ION YIELDS OF SILICON [J]. APPLIED SURFACE SCIENCE, 1981, 7 (04) : 372 - 392

[10] ION-BEAM-INDUCED ATOMIC MIXING AT THE SIO2-SI INTERFACE [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 237 - 240

[1] IMPLICATIONS IN THE USE OF SPUTTERING FOR LAYER REMOVAL - SYSTEM AU ON SI [J]. RADIATION EFFECTS LETTERS, 1979, 43 (03): : 105 - 110

[2] BOUDEWIJN PR, UNPUB

[3] SIMS STUDY OF THE SIO2/SI INTERFACE AND OF THE SI+O2 SYSTEM [J]. SURFACE AND INTERFACE ANALYSIS, 1983, 5 (02) : 83 - 86

[4] SIMS ANALYSIS OF AQUEOUS CORROSION PROFILES IN SODA-LIME-SILICA GLASS [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1979, 62 (1-2) : 4 - 9

[5] ION-INDUCED MIGRATION OF CU INTO SI [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) : 1947 - 1951

[6] Hofmann S., 1980, Surface and Interface Analysis, V2, P148, DOI 10.1002/sia.740020406

[7] LITMARK U, 1980, NUCL INSTRUM METHODS, V168, P329

[8] MAGEE CW, 1982, SPRINGER SERIES CHEM, V19

[9] THE INFLUENCE OF BOMBARDMENT CONDITIONS UPON THE SPUTTERING AND SECONDARY ION YIELDS OF SILICON [J]. APPLIED SURFACE SCIENCE, 1981, 7 (04) : 372 - 392

[10] ION-BEAM-INDUCED ATOMIC MIXING AT THE SIO2-SI INTERFACE [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 237 - 240