REMEASUREMENT OF A SILICON LATTICE PERIOD

被引:30
作者
DESLATTES, RD
TANAKA, M
GREENE, GL
HENINS, A
KESSLER, EG
机构
关键词
D O I
10.1109/TIM.1987.6312661
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:166 / 169
页数:4
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