ESCA STUDY OF AMORPHOUS CVD SI3N4-BN COMPOSITES

CVD nano-composites have fine dispersion uniformly present in the matrix. This type of composite can be prepared through a co-deposition process using many source gases simultaneously. The authors prepared plate-like amorphous Si-N-B on a graphite substrate using SiCl//4, NH//3, B//2H//6 and H//2 as source gases. The microsructure of this material was investigated using electron spectroscopy for chemical analysis (ESCA). Three kinds of amorphous CVD Si-N-B having different amounts of boron contents, boron-free amorphous CVD Si//3N//4, CVD BN (graphitic) and metallic boron, were used as specimens.