AMORPHOUS DIFFUSION-BARRIERS IN AL-SI AND AU-SI CONTACTS

被引：6

作者：

HUNG, LS

COLGAN, EG

MAYER, JW

机构：

来源：

关键词：

D O I：

10.1063/1.337502

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4177 / 4181

页数：5

共 17 条

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[3] Hansen M., 1965, CONSTITUTION BINARY
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[J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (07) : 2416 - 2421
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[8] MOFFAT WG, 1984, HDB BINARY PHASE DIA
[9] DIFFUSION BARRIERS IN THIN-FILMS
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[J]. THIN SOLID FILMS, 1978, 52 (03) : 415 - 443
[10] AL/TIW REACTION-KINETICS - INFLUENCE OF CU AND INTERFACE OXIDES
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