ASYMMETRIC CLADDING-RIDGE WAVE-GUIDE LASER BY SELECTIVE-AREA MOCVD

被引:1
作者
SMITH, GM
FORBES, DV
LAMMERT, RM
COLEMAN, JJ
机构
[1] Microelectronics Laboratory, University of Illinois, Urbana, IL 61801
基金
美国国家科学基金会;
关键词
D O I
10.1109/68.473463
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ridge waveguide lasers with a thin upper cladding layer are fabricated with a two-step selective-area MOCVD growth. The lower cladding, active region, and upper cladding are all grown in the initial MOCVD growth. A second growth over an oxide pattern is used to define the ridge with 0.15 mu m of GaAs, which serves as both the contact and index increasing layer. Ridge lasers fabricated by this method (3 x 425 mu m) have a cw threshold current of 12.6 mA, slope efficiency of 0.26 W/A, and operate in a fundamental transverse mode as well as stable fundamental lateral mode to 20 times threshold.
引用
收藏
页码:1255 / 1257
页数:3
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