CORRELATION OF SCHOTTKY-BARRIER HEIGHT AND MICROSTRUCTURE IN THE EPITAXIAL NI SILICIDE ON SI(111)

被引:130
作者
LIEHR, M [1 ]
SCHMID, PE [1 ]
LEGOUES, FK [1 ]
HO, PS [1 ]
机构
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1103/PhysRevLett.54.2139
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:2139 / 2142
页数:4
相关论文
共 9 条
[1]  
CLABES JG, UNPUB
[2]   CHEMICAL BONDING AND SCHOTTKY-BARRIER FORMATION AT TRANSITION-METAL SILICON INTERFACES [J].
HO, PS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1983, 1 (02) :745-756
[3]  
IWAMI M, 1980, J ELECTROCHEM SOC, V80, P102
[4]   BARRIER HEIGHTS AND SILICIDE FORMATION FOR NI, PD, AND PT ON SILICON [J].
OTTAVIANI, G ;
TU, KN ;
MAYER, JW .
PHYSICAL REVIEW B, 1981, 24 (06) :3354-3359
[5]   EFFECTS OF VARIATIONS OF SILICIDE CHARACTERISTICS ON THE SCHOTTKY-BARRIER HEIGHT OF SILICIDE-SILICON INTERFACES [J].
SCHMID, PE ;
HO, PS ;
FOLL, H ;
TAN, TY .
PHYSICAL REVIEW B, 1983, 28 (08) :4593-4601
[6]   SCHOTTKY-BARRIER HEIGHTS AND THE CONTINUUM OF GAP STATES [J].
TERSOFF, J .
PHYSICAL REVIEW LETTERS, 1984, 52 (06) :465-468
[7]   FORMATION OF ULTRATHIN SINGLE-CRYSTAL SILICIDE FILMS ON SI - SURFACE AND INTERFACIAL STABILIZATION OF SI-NISI2 EPITAXIAL STRUCTURES [J].
TUNG, RT ;
GIBSON, JM ;
POATE, JM .
PHYSICAL REVIEW LETTERS, 1983, 50 (06) :429-432
[9]  
YANG E, UNPUB