LOW-ENERGY AR+ ION SPUTTERING OF LIQUID AND SOLID INDIUM

被引：5

作者：

HURST, BL

COOPER, CB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 09期

关键词：

D O I：

10.1063/1.331507

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6372 / 6375

页数：4

共 19 条

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HOU, M ;

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APPLIED PHYSICS, 1979, 18 (04) :381-389

[8] LOW-ENERGY AR+ SPUTTERING YIELDS OF SOLID AND LIQUID TIN [J].

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