THE EFFECTS OF TITANIUM SILICIDE FORMATION ON DOPANT REDISTRIBUTION

被引：28

作者：

OSBURN, CM

BRAT, T

SHARMA, D

GRIFFIS, D

CORCORAN, S

LIN, S

CHU, WK

PARIKH, N

机构：

[1] N CAROLINA STATE UNIV, RALEIGH, NC 27607 USA

[2] UNIV N CAROLINA, CHAPEL HILL, NC 27514 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 06期

关键词：

D O I：

10.1149/1.2096041

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1490 / 1504

页数：15

共 54 条

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