ANOMALOUS TIME-OF-FLIGHT DISTRIBUTIONS OBSERVED FOR ARGON IMPLANTED IN SILICON AND RESPUTTERED BY AR+-ION BOMBARDMENT

被引：33

作者：

VANVEEN, GNA

SANDERS, FHM

DIELEMAN, J

VANVEEN, A

OOSTRA, DJ

DEVRIES, AE

机构：

[1] TECH HOGESCH DELFT,INTERUNIV REACTOR INST,2629 JB DELFT,NETHERLANDS

[2] FDN FUNDAMENTAL RES MATTER,INST ATOM & MOLEC PHYS,1009 DB AMSTERDAM,NETHERLANDS

来源：

PHYSICAL REVIEW LETTERS | 1986年 / 57卷 / 06期

关键词：

D O I：

10.1103/PhysRevLett.57.739

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：739 / 742

页数：4

共 18 条

[1] DEPENDENCE OF RESIDUAL DAMAGE ON TEMPERATURE DURING AR+ SPUTTER CLEANING OF SILICON [J].

BEAN, JC ;

BECKER, GE ;

PETROFF, PM ;

SEIDEL, TE .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) :907-913

[2]

DIELEMAN J, 1983, VIDE COUCHES MINCE S, V218, P3

[3] DIFFUSION ENHANCEMENT DUE TO LOW-ENERGY ION-BOMBARDMENT DURING SPUTTER ETCHING AND DEPOSITION [J].

ELTOUKHY, AH ;

GREENE, JE .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) :4444-4452

[4] THE FORMATION OF SOLID KRYPTON BUBBLES IN MOLYBDENUM [J].

EVANS, JH ;

MAZEY, DJ .

SCRIPTA METALLURGICA, 1985, 19 (05) :621-623

[5] SURFACE-MORPHOLOGY OF OXIDIZED AND ION-ETCHED SILICON BY SCANNING TUNNELING MICROSCOPY [J].

FEENSTRA, RM ;

OEHRLEIN, GS .

APPLIED PHYSICS LETTERS, 1985, 47 (02) :97-99

[6] THE ENERGY OF HELIUM FILLED PLATELETS AND BUBBLES IN MOLYBDENUM [J].

FINNIS, MW ;

VANVEEN, A ;

CASPERS, LM .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 78 (1-4) :121-132

[7] SPUTTERING OF CONDENSED NOBLE-GASES BY KEV HEAVY-IONS [J].

HARING, RA ;

PEDRYS, R ;

HARING, A ;

DEVRIES, AE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) :40-54

[8] MASS AND ENERGY-DISTRIBUTION OF PARTICLES SPUTTER ETCHED FROM SI IN A XEF2 ENVIRONMENT [J].

HARING, RA ;

HARING, A ;

SARIS, FW ;

DEVRIES, AE .

APPLIED PHYSICS LETTERS, 1982, 41 (02) :174-176

[9]

KOLFSCHOTEN AW, 1984, J APPL PHYS, V55, P3818

[10] IONIC ENTRAPMENT + THERMAL DESORPTION OF INERT GASES IN TUNGSTEN FOR KINETIC ENERGIES OF 40 EV TO 5 KEV [J].

KORNELSEN, EV .

CANADIAN JOURNAL OF PHYSICS, 1964, 42 (02) :364-&

← 1 2 →