STRAIN EFFECTS ASSOCIATED WITH SIO LAYERS EVAPORATED ONTO GAAS

被引:2
作者
BOOYENS, H [1 ]
PROTO, GR [1 ]
BASSON, JH [1 ]
机构
[1] IBM CORP, THOMAS J WATSON RES CTR, YORKTOWN HTS, NY 10598 USA
关键词
D O I
10.1063/1.331803
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:5779 / 5784
页数:6
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