ACHROMATIC 2-STAGE EXB MASS FILTER FOR A FOCUSED ION-BEAM COLUMN WITH COLLIMATED BEAM

被引：7

作者：

TEICHERT, J ^{[1
]}

TIUNOV, MA ^{[1
]}

机构：

[1] NOVOSIBIRSK NUCL RES INST, NOVOSIBIRSK, RUSSIA

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1993年 / 4卷 / 07期

关键词：

D O I：

10.1088/0957-0233/4/7/007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A two-stage achromatic E x B mass separator has been designed for a high-current focused ion beam column with collimated beam. The separator consists of two homogeneous field E x B filters, a stigmator and the separation aperture. The second-order geometrical and chromatic aberration coefficients are derived and their dependence on magnetic pole piece and electrode geometry are investigated in performing electric and magnetic field calculations. The influence of the mass separator on the spatial resolution of the column is discussed.

引用

页码：754 / 763

页数：10

共 16 条

[1] FOCUSED ION-BEAM SYSTEM WITH HIGH-CURRENT DENSITY [J].

BISCHOFF, L ;

HESSE, E ;

JANSSEN, D ;

NAEHRING, FK ;

NOTZOLD, F ;

SCHMIDT, G ;

TEICHERT, J .

MICROELECTRONIC ENGINEERING, 1991, 13 (1-4) :367-370

[2] ACHROMATIC MASS FILTER EMPLOYING PERMANENT MAGNETS FOR THE DELFT ION BEAM PATTERN GENERATOR. [J].

Bohlander, J.H. ;

Slingerland, H.N. ;

Koets, E. ;

van der Mast, K.D. .

Microelectronic Engineering, 1987, 7 (01) :61-89

[3]

CLEAVER JRA, 1983, MICROCIRCUIT ENG 83, P135

[4]

Glaser W., 1952, GRUNDLAGEN ELEKTRONE

[5] MASS-SEPARATED MICROBEAM SYSTEM WITH A LIQUID-METAL-ION SOURCE [J].

ISHITANI, T ;

UMEMURA, K ;

TAMURA, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :363-367

[6] FOCUSED ION-BEAM SYSTEM WITH A 4 STAGE EXB MASS FILTER [J].

KAWANAMI, Y ;

ISHITANI, T ;

UMEMURA, K .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :240-243

[7]

KURODA K, 1990, OPTIK, V86, P64

[8]

KURODA K, 1984, OPTIK, V66, P355

[9]

SCHEINFEIN MR, 1989, OPTIK, V82, P99

[10] EXB MASS-SEPARATOR DESIGN [J].

SELIGER, RL .

JOURNAL OF APPLIED PHYSICS, 1972, 43 (05) :2352-&

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