MASS-SEPARATED MICROBEAM SYSTEM WITH A LIQUID-METAL-ION SOURCE

被引：17

作者：

ISHITANI, T

UMEMURA, K

TAMURA, H

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 218卷 / 1-3期

关键词：

D O I：

10.1016/0167-5087(83)91007-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：363 / 367

页数：5

共 17 条

[1]

Brandon D. G., 1964, SURF SCI, V3, P1

[2] ADVANCES IN MOLTEN-METAL FIELD-ION SOURCES [J].

CLAMPITT, R .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 189 (01) :111-116

[3] FIELD-ION EMISSION FROM LIQUID-TIN [J].

DIXON, A ;

COLLIEX, C ;

OHANA, R ;

SUDRAUD, P ;

VANDEWALLE, J .

PHYSICAL REVIEW LETTERS, 1981, 46 (13) :865-868

[4] LIQUID-METAL ALLOY ION SOURCES FOR B, SB, AND SI [J].

GAMO, K ;

UKEGAWA, T ;

INOMOTO, Y ;

OCHIAI, Y ;

NAMBA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :1182-1185

[5] B, AS AND SI FIELD-ION SOURCES [J].

GAMO, K ;

UKEGAWA, T ;

INOMOTO, Y ;

KA, KK ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (10) :L595-L598

[6] SCANNING MICROBEAM USING A LIQUID-METAL ION-SOURCE [J].

ISHITANI, T ;

TAMURA, H ;

TODOKORO, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (01) :80-83

[7] CARBON NEEDLE EMITTER FOR BORON AND ALUMINUM ION LIQUID-METAL-ION SOURCES [J].

ISHITANI, T ;

SHIMASE, A ;

TAMURA, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (05) :L277-L278

[8] 3-ANODE ACCELERATING LENS SYSTEM FOR FIELD-EMISSION SCANNING ELECTRON-MICROSCOPE [J].

KURODA, K ;

EBISUI, H ;

SUZUKI, T .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (05) :2336-2342

[9]

LEVISETTI R, 1980, ADV ELECTRON ELE A S, V13, P261

[10]

MORIIZUMI K, 1983, 14TH P S ION IMPL SU, P173

← 1 2 →