CARBON NEEDLE EMITTER FOR BORON AND ALUMINUM ION LIQUID-METAL-ION SOURCES

被引：15

作者：

ISHITANI, T

SHIMASE, A

TAMURA, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1982年 / 21卷 / 05期

关键词：

D O I：

10.1143/JJAP.21.L277

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L277 / L278

页数：2

共 8 条

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[6]

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