MICROFABRICATION TECHNIQUES FOR INTEGRATED SENSORS AND MICROSYSTEMS

被引：224

作者：

WISE, KD

NAJAFI, K

机构：

[1] Center for Integrated Sensors and Circuits, University of Michigan, Ann Arbor

来源：

SCIENCE | 1991年 / 254卷 / 5036期

关键词：

D O I：

10.1126/science.1962192

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.

引用

页码：1335 / 1342

页数：8

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