QUARTZ CRYSTAL MICROBALANCE THIN-FILM DISSOLUTION RATE MONITOR

被引：18

作者：

HINSBERG, WD

KANAZAWA, KK

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 03期

关键词：

D O I：

10.1063/1.1140405

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：489 / 492

页数：4

共 11 条

[1]

BRUCKENSTEIN S, 1983, MAR PITTSB C EXP ATL

[2]

COBURN JW, 1984, APPLICATIONS PIEZOEL, pCH7

[3] OPTICAL LITHOGRAPHY [J].

DILL, FH .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) :440-444

[4] MEASUREMENT OF THIN-FILM DISSOLUTION KINETICS USING A QUARTZ CRYSTAL MICROBALANCE [J].

HINSBERG, WD ;

WILLSON, CG ;

KANAZAWA, KK .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (07) :1448-1451

[5] FREQUENCY OF A QUARTZ MICROBALANCE IN CONTACT WITH LIQUID [J].

KANAZAWA, KK ;

GORDON, JG .

ANALYTICAL CHEMISTRY, 1985, 57 (08) :1770-1771

[6] PIEZOELECTRIC-CRYSTALS AS DETECTORS IN LIQUID-CHROMATOGRAPHY [J].

KONASH, PL ;

BASTIAANS, GJ .

ANALYTICAL CHEMISTRY, 1980, 52 (12) :1929-1931

[7] INSITU MEASUREMENT OF DIELECTRIC THICKNESS DURING ETCHING OR DEVELOPING PROCESSES [J].

KONNERTH, KL ;

DILL, FH .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) :452-456

[8] PHOTOSOLUBILITY OF DIAZOQUINONE RESISTS [J].

MEYERHOFER, D .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (05) :921-926

[9] BEHAVIOR OF A PIEZOELECTRIC QUARTZ CRYSTAL IN AN AQUEOUS-SOLUTION AND THE APPLICATION TO THE DETERMINATION OF MINUTE AMOUNT OF CYANIDE [J].

NOMURA, T ;

MINEMURA, A .

NIPPON KAGAKU KAISHI, 1980, (10) :1621-1625

[10] INSITU CHARACTERIZATION OF POSITIVE RESIST DEVELOPMENT [J].

OLDHAM, WG .

OPTICAL ENGINEERING, 1979, 18 (01) :59-62

← 1 2 →