PROPERTIES OF WSIX USING DICHLOROSILANE IN A SINGLE-WAFER SYSTEM

被引：18

作者：

WU, THT

ROSLER, RS

LAMARTINE, BC

GREGORY, RB

TOMPKINS, HG

机构：

[1] MOTOROLA INC,PHOENIX,AZ 85008

[2] MOTOROLA INC,MESA,AZ 85202

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584165

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1707 / 1713

页数：7

共 15 条

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[3]

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[8]

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