UNITED-STATES NAVY MANUFACTURING TECHNOLOGY PROGRAM ON ION-IMPLANTATION

被引：12

作者：

SMIDT, FA ^{[1
]}

SARTWELL, BD ^{[1
]}

BUNKER, SN ^{[1
]}

机构：

[1] SPIRE CORP,BEDFORD,MA 01730

来源：

MATERIALS SCIENCE AND ENGINEERING | 1987年 / 90卷

关键词：

D O I：

10.1016/0025-5416(87)90236-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：385 / 397

页数：13

共 17 条

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BUNKER, SN .

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[2] INSITU AUGER ANALYSIS OF SURFACE-COMPOSITION DURING HIGH FLUENCE ION-IMPLANTATION [J].

BALDWIN, DA ;

SARTWELL, BD ;

SINGER, IL .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :49-53

[3] INSITU AUGER-ELECTRON SPECTROSCOPY APPLIED TO THE STUDY OF CHEMISORPTION AND DIFFUSION DURING REACTIVE IMPLANTATION OF TITANIUM INTO IRON [J].

BALDWIN, DA ;

SARTWELL, BD ;

SINGER, IL .

APPLIED SURFACE SCIENCE, 1986, 25 (04) :364-379

[4]

BUNKER SN, 1986, UNPUB

[5] IMPLNT - A FORTRAN PROGRAM TO CALCULATE THE DISTRIBUTION OF IMPLANTED IONS WHICH INCLUDES THE EFFECTS DUE TO SPUTTERING [J].

DAVISSON, CM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 13 (1-3) :421-425

[6]

FARKAS D, 1984, 1983 MAT RES SOC S P, V27, P609

[7] METHOD FOR DETERMINING DEPTH PROFILES OF TRANSITION-ELEMENTS IN STEELS [J].

GOSSETT, CR .

NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3) :217-221

[8]

GRABOWSKI KS, 1983, 4TH P INT C ION IMPL, P364

[9]

GRABOWSKI KS, 1984, 1983 MAT RES SOC S P, V27, P615

[10] DEPTH DISTRIBUTION OF ENERGY DEPOSITION BY ION-BOMBARDMENT [J].

MANNING, I ;

MUELLER, GP .

COMPUTER PHYSICS COMMUNICATIONS, 1974, 7 (02) :85-94

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