SURFACE ROUGHENING UNDER ION-BOMBARDMENT

被引：13

作者：

BHATIA, CS ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

关键词：

D O I：

10.1016/0040-6090(82)90249-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：249 / 256

页数：8

共 8 条

[1]

GRUNG GL, 1973, THESIS U MINNESOTA

[2]

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HOFER, WO ;

LIEBL, H .

APPLIED PHYSICS, 1975, 8 (04) :359-360

[4]

OHASHI Y, 1976, JPN J APPL PHYS, V15, P349

[5]

SCHWANEBECK JC, 1973, THESIS U MINNESOTA

[6] MECHANISM OF SURFACE MICRO-ROUGHENING BY ION-BOMBARDMENT [J].

SIGMUND, P .

TARNG, ML ;

WEHNER, GK .

[8] CONE FORMATION ON METAL TARGETS DURING SPUTTERING [J].

WEHNER, GK ;

HAJICEK, DJ .