ELECTRICAL CHARACTERIZATION OF ALLOY THIN-FILMS OF VSI2 AND V3SI

被引：5

作者：

NAVA, F ^{[1
]}

BISI, O ^{[1
]}

PSARAS, P ^{[1
]}

TAKAI, H ^{[1
]}

TU, KN ^{[1
]}

机构：

[1] IBM,TJ WATSON RES CTR,YORKTOWN HTS,NY 10597

来源：

THIN SOLID FILMS | 1986年 / 140卷 / 01期

关键词：

VANADIUM SILICIDES;

D O I：

10.1016/0040-6090(86)90171-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

(Edited Abstract)

引用

收藏

页码：167 / 172

页数：6

相关论文

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