共 9 条
[1]
ABELSON JR, AMORPHOUS SILICON TE
[2]
FENG GF, AMORPHOUS SILICON TE
[4]
MALEY N, 1991, AMORPHOUS SILICON TE
[5]
MONTE-CARLO SIMULATIONS OF MAGNETRON SPUTTERING PARTICLE-TRANSPORT
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1991, 9 (03)
:614-618
[6]
MYERS AM, 1990, AMORPHOUS SILICON TE, V192, P595
[7]
MYERS AM, 1991, THESIS U ILLINOIS
[8]
THE MICROSTRUCTURE OF SPUTTER-DEPOSITED COATINGS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (06)
:3059-3065
[9]
INVESTIGATION OF THE VOID STRUCTURE IN AMORPHOUS-GERMANIUM THIN-FILMS AS A FUNCTION OF LOW-ENERGY ION-BOMBARDMENT
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1988, 6 (03)
:1631-1635