INVESTIGATION OF THE VOID STRUCTURE IN AMORPHOUS-GERMANIUM THIN-FILMS AS A FUNCTION OF LOW-ENERGY ION-BOMBARDMENT

被引：77

作者：

YEHODA, JE

YANG, B

VEDAM, K

MESSIER, R

机构：

[1] PENN STATE UNIV,DEPT PHYS,UNIVERSITY PK,PA 16802

[2] PENN STATE UNIV,DEPT ENGN SCI,UNIVERSITY PK,PA 16802

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575341

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1631 / 1635

页数：5

共 26 条

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