NEUTRAL RADICAL DEPOSITION FROM SILANE DISCHARGES

被引：146

作者：

GALLAGHER, A

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 07期

关键词：

D O I：

10.1063/1.341034

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2406 / 2413

页数：8

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