THE FORMATION OF POROUS SILICON BY CHEMICAL STAIN ETCHES

被引：51

作者：

BEALE, MIJ

BENJAMIN, JD

UREN, MJ

CHEW, NG

CULLIS, AG

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1986年 / 75卷 / 03期

关键词：

D O I：

10.1016/0022-0248(86)90082-5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：408 / 414

页数：7

相关论文

共 7 条

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UREN, MJ
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CULLIS, AG
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