UHV SPUTTER DEPOSITION WITH A RESEARCH-SCALE DC MAGNETRON

被引:43
作者
SOMEKH, RE
BARBER, ZH
机构
来源
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1988年 / 21卷 / 11期
关键词
D O I
10.1088/0022-3735/21/11/005
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:1029 / 1033
页数:5
相关论文
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