GETTER SPUTTERING - REVIEW

[1] BEACH ACG, 1930, J SCI INSTRUM, V7, P193

[2] BEKEVSKII VP, 1973, INSTRUM EXP TECH MAY

[3] BEKEVSKII VP, 1972, PRIBORY TEKNIKA NOV, P219

[4] BERGHAUS B, 1939, Patent No. 505799

[5] BERHAUS B, 1943, Patent No. 736130

[6] COOK HC, 1966, T METALL SOC AIME, V236, P314

[7] GAS-ANALYSIS IN AN RF SPUTTERING PLANT [J]. NATURE-PHYSICAL SCIENCE, 1973, 241 (112): : 149 - 150

[8] DARBYSHIRE JA, 1933, J SCI I, V10, P83

[9] ALUMINUM FILMS DEPOSITED BY RF SPUTTERING [J]. METALLURGICAL TRANSACTIONS, 1970, 1 (03): : 725 - &

[10] SUPERCONDUCTIVE FILMS MADE BY PROTECTED SPUTTERING OF TANTALUM OR NIOBIUM [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) : 1898 - &

[1] BEACH ACG, 1930, J SCI INSTRUM, V7, P193

[2] BEKEVSKII VP, 1973, INSTRUM EXP TECH MAY

[3] BEKEVSKII VP, 1972, PRIBORY TEKNIKA NOV, P219

[4] BERGHAUS B, 1939, Patent No. 505799

[5] BERHAUS B, 1943, Patent No. 736130

[6] COOK HC, 1966, T METALL SOC AIME, V236, P314

[7] GAS-ANALYSIS IN AN RF SPUTTERING PLANT [J]. NATURE-PHYSICAL SCIENCE, 1973, 241 (112): : 149 - 150

[8] DARBYSHIRE JA, 1933, J SCI I, V10, P83

[9] ALUMINUM FILMS DEPOSITED BY RF SPUTTERING [J]. METALLURGICAL TRANSACTIONS, 1970, 1 (03): : 725 - &

[10] SUPERCONDUCTIVE FILMS MADE BY PROTECTED SPUTTERING OF TANTALUM OR NIOBIUM [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) : 1898 - &