THE CHARACTERIZATION OF SEMICONDUCTOR-MATERIALS BY BACKSCATTERING SPECTROSCOPY

被引：6

作者：

KEENAN, JA

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 10-1卷 / MAY期

关键词：

D O I：

10.1016/0168-583X(85)90313-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：583 / 587

页数：5

共 13 条

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