PHOSPHORUS ABLATION PROCESS AS A HYDROGEN-ATOM PROBE IN A REMOTE H-2 PLASMA REACTOR

The ablation process of phosphorus by H atoms has been applied to the measurement of the H atom density in the downstream current of a H2 plasma. The calibration of the etching rate in terms of absolute density of H atoms has been done on the basis of their decay kinetics in the afterglow region. H atom density data have been determined by operating H2 plasmas at different values of gas flow rate, rf power, and pressure. © 1995 American Institute of Physics.