ION-BEAM REHYDROGENATION AND POST-HYDROGENATION OF A-SI-H

被引：5

作者：

TSUO, YS

DENG, XJ

SMITH, EB

XU, Y

DEB, SK

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 03期

关键词：

D O I：

10.1063/1.341800

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1604 / 1607

页数：4

共 27 条

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