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PRECISION MANIPULATOR HEATING AND COOLING ASSEMBLY COMPATIBLE WITH SAMPLE TRANSFER

被引：3
作者：
OUTLAW, RA
BAUGH, BT
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 21卷 / 04期
关键词：
D O I：
10.1116/1.571859
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1037 / 1038
页数：2
相关论文
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