AN INTRINSIC STRESS SCALING LAW FOR POLYCRYSTALLINE THIN-FILMS PREPARED BY ION-BEAM SPUTTERING

被引：359

作者：

WINDISCHMANN, H

机构：

来源：

关键词：

D O I：

10.1063/1.339560

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1800 / 1807

页数：8

共 47 条

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