ENERGY-DEPENDENCE OF THE STRESS IN DIAMOND-LIKE CARBON-FILMS

被引：19

作者：

NIR, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573667

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2954 / 2955

页数：2

共 11 条

[1] ANGUS JC, 1984, THIN SOLID FILMS, V118, P311, DOI 10.1016/0040-6090(84)90202-5
[2] ION-BEAM SPUTTER-DEPOSITED DIAMOND-LIKE FILMS
BANKS, BA
RUTLEDGE, SK
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03): : 807 - 814
[3] SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS
ENKE, K
[J]. THIN SOLID FILMS, 1981, 80 (1-3) : 227 - 234
[4] FORD H, 1962, ADV MECHANICS MATERI, pCH22
[5] THIN-FILM ANNEALING BY ION-BOMBARDMENT
HIRSCH, EH
VARGA, IK
[J]. THIN SOLID FILMS, 1980, 69 (01) : 99 - 105
[6] GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA
HOLLAND, L
OJHA, SM
[J]. THIN SOLID FILMS, 1979, 58 (01) : 107 - 116
[7] MEISSEL I, 1970, HDB THIN FILMS TECHN, P12
[8] STRESS RELIEF FORMS OF DIAMOND-LIKE CARBON THIN-FILMS UNDER INTERNAL COMPRESSIVE STRESS
NIR, D
[J]. THIN SOLID FILMS, 1984, 112 (01) : 41 - 49
[9] TAIT NRS, 1979, NUCL INSTRUM METHODS, V176, P433
[10] ION-SURFACE INTERACTIONS DURING THIN-FILM DEPOSITION
TAKAGI, T
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 382 - 388