PHOTOTHERMAL EFFECT CONTRIBUTION ON FILM QUALITY IMPROVEMENT IN EXCIMER-LASER INDUCED METAL CVD

被引：37

作者：

YOKOYAMA, H

UESUGI, F

KISHIDA, S

WASHIO, K

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1985年 / 37卷 / 01期

关键词：

D O I：

10.1007/BF00617865

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：25 / 30

页数：6

共 12 条

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