EXPERIMENTAL AND THEORETICAL INVESTIGATIONS INTO THE ORIGIN OF CROSS-CONTAMINATION EFFECTS OBSERVED IN A QUADRUPOLE-BASED SIMS INSTRUMENT

被引：18

作者：

WITTMAACK, K

机构：

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1985年 / 38卷 / 04期

关键词：

D O I：

10.1007/BF00616059

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：235 / 252

页数：18

共 25 条

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