INGAASP(1.3-MU-M)/INP VERTICAL-CAVITY SURFACE-EMITTING LASER GROWN BY METALORGANIC VAPOR-PHASE EPITAXY

被引:17
作者
YANG, L
WU, MC
TAI, K
TANBUNEK, T
LOGAN, RA
机构
[1] AT and T Bell Laboratories, Murray Hill
关键词
D O I
10.1063/1.102619
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report InGaAsP/InP vertical-cavity surface-emitting lasers (VCSELs) with an emission wavelength near 1.3 μm grown by metalorganic vapor phase epitaxy. The VCSEL structure contains a double-heterostructure cavity, a metal mirror, and a SiO2/Si dielectric stack (three pairs) mirror with a measured reflectivity of 98%. A threshold current as low as 5 mA for 15-μm-diam devices with a 1-μm-thick active layer at 77 K was achieved, which is close to the best reported value (6 mA) within the accuracy of the pulse measurement. The highest operating temperature was 220 K.
引用
收藏
页码:889 / 891
页数:3
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