A COMPARISON OF METHODS FOR THE DETERMINATION OF OPTICAL-CONSTANTS OF THIN-FILMS

被引：17

作者：

DELPOZO, JM

DIAZ, L

机构：

[1] Instituto de Optica, CSIC, 28006 Madrid

来源：

THIN SOLID FILMS | 1992年 / 209卷 / 01期

关键词：

D O I：

10.1016/0040-6090(92)90023-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Three methods for the determination of the optical constants and thickness of thin films using spectrophotometric measurements have been compared. The methods were applied to simulated and experimental amorphous germanium films with several thicknesses. The determination of film thickness is better than by using a mechanical profilometer. The characteristics and range of application of each method are discussed with both simulated and experimental spectra.

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页码：137 / 144

页数：8

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