CHARACTERISTICS AND 3-DIMENSIONAL INTEGRATION OF MOSFETS IN SMALL-GRAIN LPCVD POLYCRYSTALLINE SILICON

被引：14

作者：

MALHI, SDS

SHICHIJO, H

BANERJEE, SK

SUNDARESAN, R

ELAHY, M

POLLACK, GP

RICHARDSON, WF

SHAH, AH

HITE, LR

WOMACK, RH

CHATTERJEE, PK

LAM, HW

机构：

来源：

关键词：

D O I：

10.1109/JSSC.1985.1052293

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：178 / 201

页数：24

共 68 条

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