DETERMINATION OF ENERGY-DISTRIBUTION OF INTERFACE TRAPS IN METAL NITRIDE OXIDE SILICON (MEMORY) DEVICES USING NON-STEADY-STATE TECHNIQUES

被引:25
作者
URANWALA, JS [1 ]
SIMMONS, JG [1 ]
MAR, HA [1 ]
机构
[1] UNIV TORONTO,DEPT ELECT ENGN,TORONTO M5S 1A4,ONTARIO,CANADA
关键词
D O I
10.1016/0038-1101(76)90073-3
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:375 / 380
页数:6
相关论文
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[5]   THEORY OF TRANSIENT EMISSION CURRENT IN MOS DEVICES AND DIRECT DETERMINATION INTERFACE TRAP PARAMETERS [J].
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[6]   TRANSIENT ISOTHERMAL GENERATION AT SILICON-SILICON OXIDE INTERFACE AND DIRECT DETERMINATION OF INTERFACE TRAP DISTRIBUTION [J].
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[7]  
SIMMONS JG, 1973, PHYS REV B, V8, P4865